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Features
1) 0 to 1 bar range (14.5 PSI)
2) High sensitivity (240 mV @ 5 V)
3) Absolute or Differential
4) Small Die size 2.0 x 1.86 mm
5) High Reliability, Low Cost

Applications
1) High resolution absolute sensor systems
2) Engine Control
3) Barometers, Altimeters
4) Variometers

Description
The sensor element of the MS761 consists of a silicon micro-machined membrane with a Pyrex? glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS761D) has a hole in the Pyrex? glass at the backside of the sensor.